Advanced nanoscale metrology of pole-tip recession with AFM

Ultramicroscopy

Volumn 105, Issue 1-4, 2005, Pages 51-56

  Kwon, Joonhyung ^a   Kim, Yong Seog ^a   Yoon, Kwanseok ^a   Lee, Sang Min ^a   Park, Sang Il ^a  

^a PSIA Corporation   (South Korea)

Author keywords

AFM; FMM; Non contact AFM; PTR; Tapping mode AFM

Indexed keywords

ATOMIC FORCE MICROSCOPY; MAGNETORESISTANCE; NANOSTRUCTURED MATERIALS; PIEZOELECTRIC DEVICES; SCANNING;

CONTACT MODE; FORCE MODULATION MICROSCOPY; PIEZOELECTRIC TUBE SCANNERS; POLE-TIP RECESSION (PTR);

MEASUREMENT THEORY;

NANOPARTICLE;

ACCURACY; ATOMIC FORCE MICROSCOPY; CONFERENCE PAPER; MAGNETIC FIELD; MEASUREMENT; MICROSCOPE; PIEZOELECTRICITY;

EID: 27544502917     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultramic.2005.06.017     Document Type: Conference Paper

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