Thermally actuated probe arrays for manipulation and characterization of individual bio-cell

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 2, Issue , 2003, Pages 1255-1258

  Kim, Beomjoon ^a   Collard, D ^a   Lagouge, M ^b   Conseil, F ^b   Legrand, B ^b   Buchaillot, L ^b  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^b INSTITUT D ELECTRONIQUE   (France)

Author keywords

Actuators; Biosensors; Electric variables measurement; Etching; Fabrication; Fluidics; Force measurement; Optical sensors; Probes; Sensor arrays

Indexed keywords

ACTUATORS; BIOSENSORS; CHANNEL FLOW; ELECTRIC VARIABLES MEASUREMENT; ETCHING; FABRICATION; FLUIDICS; FORCE MEASUREMENT; MICROSYSTEMS; MOLECULAR BIOLOGY; OPTICAL SENSORS; PROBES; SENSOR ARRAYS; THERMAL EXPANSION; TRANSDUCERS;

BIO-CELLS; CALCULATED VALUES; ELECTRICAL SENSORS; FABRICATED DEVICE; FLOW CHANNELS; MICRO-MACHINED; PROBE ARRAY; THERMAL EXPANSION COEFFICIENTS;

SOLID-STATE SENSORS;

EID: 27544492527     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1217000     Document Type: Conference Paper

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6. W. C. Young, ROARK'S Formulas for stress and strain. pp. 162-174