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Volumn 40, Issue 6, 2005, Pages 1363-1366

Antireflecting coating from Ta2O5 and SiO2 multilayer films

Author keywords

[No Author keywords available]

Indexed keywords

CONCENTRATION (PROCESS); HEAT TREATMENT; MULTILAYERS; PHASE COMPOSITION; REFRACTIVE INDEX; SOL-GELS; SPIN COATING; TANTALUM COMPOUNDS; THIN FILMS;

EID: 27544489463     PISSN: 00222461     EISSN: 15734803     Source Type: Journal    
DOI: 10.1007/s10853-005-0566-2     Document Type: Conference Paper
Times cited : (52)

References (12)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.