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Volumn 40, Issue 6, 2005, Pages 1363-1366
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Antireflecting coating from Ta2O5 and SiO2 multilayer films
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Author keywords
[No Author keywords available]
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Indexed keywords
CONCENTRATION (PROCESS);
HEAT TREATMENT;
MULTILAYERS;
PHASE COMPOSITION;
REFRACTIVE INDEX;
SOL-GELS;
SPIN COATING;
TANTALUM COMPOUNDS;
THIN FILMS;
CROSS TAPE TEST;
DRY SUN TEST;
EXTINCTION COEFFICIENT;
REFLECTION MEASUREMENT;
ANTIREFLECTION COATINGS;
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EID: 27544489463
PISSN: 00222461
EISSN: 15734803
Source Type: Journal
DOI: 10.1007/s10853-005-0566-2 Document Type: Conference Paper |
Times cited : (52)
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References (12)
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