Relative control philosophy - Balance and continual change for forecasting abnormal quality characteristics in a silicon wafer slicing process

International Journal of Advanced Manufacturing Technology

Volumn 26, Issue 9-10, 2005, Pages 1109-1114

  Lin, Chin Tsai ^a   Chang, Che Wei ^a   Chen, Chie Bein ^b  

^a MING CHUAN UNIVERSITY   (Taiwan)

^b NATIONAL DONG HWA UNIVERSITY   (Taiwan)

Author keywords

Chinese philosophy; Grey forecasting; Multiple quality characteristics; Process capability; Quality control; Silicon wafer manufacturing

Indexed keywords

CONDITION MONITORING; FORECASTING; PROCESS CONTROL; QUALITY CONTROL; SILICON WAFERS;

CHINESE PHILOSOPHY; GREY FORECASTING; MULTIPLE QUALITY CHARACTERISTICS; PROCESS CAPABILITY; SILICON WAFER MANUFACTURING; SILICON WAFER SLICING;

PHILOSOPHICAL ASPECTS;

EID: 27544480786     PISSN: 02683768     EISSN: 14333015     Source Type: Journal    
DOI: 10.1007/s00170-004-2067-x     Document Type: Article

References (10)

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2. ASTM F534 (1995) Annual Book of ASTM Standards
3. ASTM F657 (1995) Annual Book of ASTM Standards
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