Optimization of the piezoresistive AFM cantilever design for use at cryogenic temperatures

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 1, Issue , 2005, Pages 625-629

  Lee, Seung Seoup ^a   Miyatake, Yutaka ^b   Shiraki, Ichiro ^c   Nagamura, Toshihiko ^b   Miki, Kazushi ^c   Ono, Takahito ^a   Esashi, Masayoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b Japan Science and Technology Agency   (Japan)

^c NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

1 f noise; Hooge noise; Johnson noise

Indexed keywords

1/F NOISE; AFM CANTILEVERS; HOOGE NOISE; JOHNSON NOISE;

CRYOGENIC EQUIPMENT; DOPING (ADDITIVES); ELECTRIC RESISTANCE; OPTIMIZATION; PIEZOELECTRIC DEVICES; SENSITIVITY ANALYSIS;

ATOMIC FORCE MICROSCOPY;

EID: 27544455928     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1111/j.1365-2265.2005.02387.x     Document Type: Conference Paper

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