Detection of amorphous-silicon residue generated in thin-film transistor manufacturing process using a high spectral response of amorphous-silicon layer on green light source

Current Applied Physics

Volumn 6, Issue 1, 2006, Pages 84-90

  Son, Jeong Seok ^a   Lee, Jong Ho ^b   Lee, Seung Hee ^c  

^a BOE HYDIS Technology Co Ltd   (South Korea)

^b Photon Dynamics   (United States)

^c Chonbuk National University   (South Korea)

Author keywords

a Si residue; Photocurrent; Screening; Thin film transistor

Indexed keywords

ELECTRIC SIGNAL SYSTEMS; LEAKAGE CURRENTS; LIQUID CRYSTAL DISPLAYS; PHOTOCURRENTS; SCREENING; THIN FILM TRANSISTORS;

A-SI RESIDUES; AMORPHOUS-SILICON RESIDUE; ARRAY TESTING SYSTEM; GREEN LIGHT;

AMORPHOUS SILICON;

EID: 27544454942     PISSN: 15671739     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.cap.2004.12.008     Document Type: Article

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