Design and implementation of an integrated floating-gate electrostatic power micro-generator

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 1, Issue , 2005, Pages 299-302

  Ma, Wei ^a   Rufer, Libor ^c   Zohar, Yitshak ^d   Wong, Man ^b  

^a Dept of Mech Engg ^*  (Hong Kong)

^b HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

^c TIMA LABORATORY   (France)

^d University of Arizona   (United States)

Author keywords

Electroplating; Electrostatic MEMS device; Energy scavenging; Post CMOS; Power generator

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELECTROPLATING; ELECTROSTATICS; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES;

ELECTROSTATIC MEMS DEVICES; ENERGY SCAVENGING; POST-CMOS; POWER GENERATORS;

ELECTRIC POWER GENERATION;

EID: 27544454594     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. J. Boland, Y. H. Chao, Y. Suzuki and Y. C. Tai, MEMS'03, Kyoto, 19-23, Jan., 2003, pp. 538-541.
2. T. Sterken, P. Fiorini, K. Baert, R. Pucrs and G. Borghs, Transducer '03, 8-12 June, 2003, pp. 1291-1294.
3. T. Ma, T. Y. Man, Y. C. Chan, Y. Zohar and M. Wong, MEMS 2002, pp. 288-291.
4. W. Ma, G. Li, Y. Zohar and M. Wong, Sensors & Actuators A, Vol. 111, 2004, pp. 63-70.
5. W. Ma, Y. Zohar and M. Wong, APCOT-MNT 2004, Sapporo, Japan, P02-42, pp. 778-782.