First step towards a fully automated trim control for liquid deposition device at the microscale using piezoresistive cantilevers row

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 1, Issue , 2005, Pages 648-651

  Belaubre, Pascal ^a   Pourciel, Jean Bernard ^a   Saya, Daisuke ^a   Leïchlé, Thierry ^a   Mathieu, Fabrice ^a   Nicu, Liviu ^a   Bergaud, Christian ^b  

^a LAAS CNRS   (France)

^b INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

Microspotting; Piezoresistive cantilevers; Trim control

Indexed keywords

FORCE SENSORS; MICROSPOTTING; PIEZORESISTIVE CANTILEVERS; TRIM CONTROL;

AUTOMATION; DEPOSITION; ERROR ANALYSIS; FORCE MEASUREMENT; SENSITIVITY ANALYSIS; SENSORS;

MICROELECTROMECHANICAL DEVICES;

EID: 27544453418     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2005.1496500     Document Type: Conference Paper

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