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Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 1, Issue , 2005, Pages 1010-1013

Micromachined mid-infrared tunable Fabry-Perot filter

(3) Neumann, Norbert a Hiller, Karla b Kurth, Steffen c

a INFRATEC GMBH (Germany)

b CHEMNITZ UNIVERSITY OF TECHNOLOGY (Germany)

c FRAUNHOFER IZM (Germany)

Author keywords

Antireflection coating; Bragg reflector; Bulk micromachining; Fabry Perot filter

Indexed keywords

ANTIREFLECTION COATING; BRAGG REFLECTOR; BULK MICROMACHINING; FABRY-PEROT FILTER;

COATING TECHNIQUES; DIELECTRIC PROPERTIES; ELECTROMAGNETIC WAVE INTERFERENCE; GAS FUEL ANALYSIS; INFRARED RADIATION; LIGHT REFLECTION; MIRRORS; OPTICAL FILTERS; POLYCRYSTALLINE MATERIALS;

MICROMACHINING;

EID: 27544433658 PISSN: None EISSN: None Source Type: Conference Proceeding
DOI: 10.1109/SENSOR.2005.1496626 Document Type: Conference Paper

Times cited : (9)

References (10)

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2
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4
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6
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- Electronically tunable, first-order Fabry-Perot-infrared filter
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7
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8
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- Thermally actuated Fabry-Perot Filter tunes across C- and L-bands
- B. Hitz, Thermally actuated Fabry-Perot Filter tunes across C- and L-bands, IEEE Photonics Leters, 1894-1896, (2004)
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9
- 0038058727
- A tunable Fabry-Perot-Interferometer for 3-4.5 μm wavelength with bulk micromachined reflector carrier
- S. Kurth, K. Hiller, N. Neumann, M. Heinze, W. Dötzel, T. Geßner, "A tunable Fabry-Perot-Interferometer for 3-4.5 μm wavelength with bulk micromachined reflector carrier", Proc. of SPIE, 4983, 215-226 (2003)
- (2003) Proc. of SPIE , vol.4983 , pp. 215-226
- Kurth, S.¹ Hiller, K.² Neumann, N.³ Heinze, M.⁴ Dötzel, W.⁵ Geßner, T.⁶

10
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- Thin Film Center Inc., Tucson
- Essential Macleod V8.9, Thin Film Center Inc., Tucson
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.