Advanced pulsed laser deposition method (eclipse angel)

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3175, Issue , 1998, Pages 347-351

  Tachiki, Minoru ^a   Morita, Eiichi ^a   Yamada, Kenji ^a   Fang, Xiaodong ^a   Kobayashi, Takeshi ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

Pulsed laser deposition; Shadow mask; Superconductor

Indexed keywords

ATOMIC LAYER DEPOSITION; COPPER; CRYSTALLOGRAPHY; GROWTH (MATERIALS); LASERS; OXYGEN; PROGRAMMABLE LOGIC CONTROLLERS; PULSED LASER DEPOSITION; THICK FILMS; THIN FILM DEVICES; THIN FILMS;

AMBIENT OXYGENS; AMBIENT PRESSURES; FILM QUALITIES; GROWTH SPECIES; LAYERED CRYSTALS; MASK STRUCTURES; PULSED LASERS; RATE ENHANCEMENTS; SHADOW MASK; SHADOW MASKS; SUPERCONDUCTOR; ULTRA FASTS;

PULSED LASER APPLICATIONS;

EID: 27444440218     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.300700     Document Type: Conference Paper

References (6)

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