Optical models for the ellipsometric characterisation of porous silicon structures

Physica Status Solidi C: Conferences

Volumn 2, Issue 9, 2005, Pages 3319-3323

  Petrik, P ^a   Vazsonyi E ^a   Fried, M ^a   Volk, J ^a   Andrews, G T ^b   Toth A L ^a   Daroczi Cs S ^a   Barsony I ^a   Gyulai, J ^a  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

^b MEMORIAL UNIVERSITY OF NEWFOUNDLAND   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROCHEMISTRY; ELLIPSOMETRY; ETCHING; MICROSTRUCTURE; THICK FILMS;

ELLIPSOMETRIC CHARACTERISATION; OPTICAL MODELS; POROUS SILICON STRUCTURES; SPECTROSCOPIC ELLIPSOMETRY SPECTROSCOPIC ELLIPSOMETRY;

POROUS SILICON;

EID: 27344438913     PISSN: 16101634     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1002/pssc.200461153     Document Type: Conference Paper

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