Trap generation and progressive wearout in thin HfSiON

IEEE International Reliability Physics Symposium Proceedings

Volumn , Issue , 2005, Pages 45-49

  Kauerauf, T ^b   Degraeve, R ^a   Crupi, F ^c   Kaczer, B ^a   Groeseneken, G ^b   Maes, H ^b  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

^c UNIVERSITY OF CALABRIA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 27144524308     PISSN: 15417026     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (21)

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