Measurement of Si 311 defect properties using x-ray scattering

Journal of Applied Physics

Volumn 98, Issue 7, 2005, Pages

  Nordlund, K ^a   Metzger, T H ^b   Malachias, A ^b   Capello, L ^b   Calvo, P ^c   Claverie, A ^c   Cristiano, F ^d  

^a UNIVERSITY OF HELSINKI   (Finland)

^b EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

^c CNRS   (France)

^d LAAS CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

DAMAGE HEALING; GRAZING-INCIDENCE X-RAY SCATTERING; ION-BEAM-DOPED SI; PRISTINE REFERENCE; SI 311;

ANNEALING; COMPUTER SIMULATION; DOPING (ADDITIVES); SILICON COMPOUNDS; TRANSMISSION ELECTRON MICROSCOPY; X RAY SCATTERING;

CRYSTAL DEFECTS;

EID: 27144505708     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2081111     Document Type: Article

References (24)

1. J. W. Mayer and S. S. Lau, Electronic Materials Science For Integrated Circuits in Si and GaAs (MacMillan, New York, 1990).
2. E. Chason, J. Appl. Phys. 81, 6513 (1997), and references therein.
3. P. Ehrhart, H. Trinkaus, and B. C. Larson, Phys. Rev. B 25, 834 (1982).
4. S. Grotehans, G. Wallner, E. Burkel, H. Metzger, J. Peisl, and H. Wagner, Phys. Rev. B 39, 8450 (1989).
5. P. Ehrhart, J. Nucl. Mater. 216, 170 (1994).
6. K. Nordlund, U. Beck, T. H. Metzger, and J. R. Patel, Appl. Phys. Lett. 76, 846 (2000).
7. D. Luebbert, J. Arthur, M. Sztucki, T. H. Metzger, P. B. Griffin, and J. R. Patel, Appl. Phys. Lett. 81, 3167 (2002).
8. M. A. Kirk, R. S. Davidson, M. L. Jenkins, and R. D. Twesten, Philos. Mag. 85, 497 (2004).
9. K. Nordlund, P. Partyka, and R. S. Averback, Mater. Res. Soc. Symp. Proc. 469, 199 (1997).
10. K. Nordlund, P. Partyka, R. S. Averback, I. K. Robinson, and P. Ehrhart, J. Appl. Phys. 88, 2278 (2000).
11. K. Nordlund, J. Appl. Phys. 91, 2978 (2002).
12. A. Parisini and A. Bourret, Philos. Mag. A 67, 605 (1992).
13. A. Bourret, Inst. Phys. Conf. Ser., 87, 39 (1987).
14. S. Takeda, Jpn. J. Appl. Phys., Part 2, 30, L639 (1991).
15. M. Sztucki, T. Metzger, I. Kegel, A. Tilke, D. Lubbert, J. Arthur, and J. Patel, J. Appl. Phys. 92, 3694 (2002).
16. J. Tersoff, Phys. Rev. B 38, 9902 (1988).
17. F. H. Stillinger and T. A. Weber, Phys. Rev. B 31, 5262 (1985).
18. N. Cherkashin, P. Calvo, F. Cristiano, B. de Mauduit, and A. Claverie, Mater. Res. Soc. Symp. Proc. 810, C3.7 (2004).
19. B. Colombeau, N. E. B. Cowern, F. Cristiano, P. Calvo, N. Cherkashin, Y. Lamrani, and A. Claverie, Appl. Phys. Lett. 83, 1953 (2003).
20. F. Cristiano, Nucl. Instrum. Methods Phys. Res. B 216, 46 (2004).
21. P. R. Bevington, Data Reduction and Error Analysis for the Physical Sciences (McGraw-Hill, New York, 1992).
22. A. Claverie, B. Colombeau, B. de Mauduit, C. Bonafos, X. Hebras, G. B. Assayag, and F. Cristiano, Appl. Phys. A 76, 1025 (2003).
23. V. C. Venezia, R. Kalyanaraman, H.-J. L. Gossmann, C. S. Rafferty, and P. Werner, Appl. Phys. Lett. 79, 1429 (2001).
24. P. Partyka, Y. Zhong, K. Nordlund, R. S. Averback, I. K. Robinson, and P. Ehrhart, Phys. Rev. B 64, 235207 (2002).