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Volumn 40, Issue 21, 2005, Pages 5703-5710

Surface failure mode evaluation of pure AlN and AlN with Al 2O3(0.1 μm) oxide layer by microscratch testing

Author keywords

[No Author keywords available]

Indexed keywords

DENSITY (SPECIFIC GRAVITY); GRAIN SIZE AND SHAPE; LOADS (FORCES); SURFACE PROPERTIES; SURFACE ROUGHNESS; TRIBOLOGY;

EID: 27144492630     PISSN: 00222461     EISSN: 15734803     Source Type: Journal    
DOI: 10.1007/s10853-005-0946-7     Document Type: Article
Times cited : (4)

References (22)
  • 8
    • 27144443120 scopus 로고
    • Contacts between solids
    • R. T. L. HOWELS and S. D. PROBERT,"Contacts Between Solids" TRG Rep., 1701 (R/X), (1968).
    • (1968) TRG Rep. , vol.1701 , Issue.R-X
    • Howels, R.T.L.1    Probert, S.D.2
  • 21
    • 27144535148 scopus 로고    scopus 로고
    • AlN Ceramics for semiconductor equipments
    • AlN Ceramics for semiconductor equipments, Ostech Electronic Mater. Catalog, 2002.
    • (2002) Ostech Electronic Mater. Catalog


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.