Monolithic integrated optical detection for microfluidic systems using thin film photodiodes based on amorphous silicon

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2005, Pages 758-761

  Schaefer, H ^a   Seibel, K ^a   Walder, M ^a   Schoeler, L ^a   Pletzer, T ^a   Waidelich, M ^a   Ihmels, H ^a   Ehrhardt, D ^a   Boehm, M ^a  

^a UNIVERSITY OF SIEGEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

FLUIDIC NETWORKS; FLUORESCENCE SENSORS; INTEGRATED MODULES; MICRO TOTAL ANALYSIS SYSTEMS;

AMORPHOUS SILICON; FLUORESCENCE; HYDRODYNAMICS; MICROELECTRONICS; MICROSTRUCTURE; OPTICAL SENSORS; OPTOELECTRONIC DEVICES; PHOTODIODES; THIN FILMS;

MONOLITHIC INTEGRATED CIRCUITS;

EID: 26944489982     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2005.1454040     Document Type: Conference Paper

References (8)

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7. a) F. Fixe, V. Chu, D.M.F. Prazeres, and J.P. Conde, "An on-chip thin film photodetector for the quantification of DNA probes and targets in microarrays", Nucleic Acids Research, vol.32, No. 9 e70, 2004
8. b) V. Chu, personal communication