Integration of a novel electrochemical tuning scheme with MEMS surface micromachined resonators

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2005, Pages 159-162

  Enderling, S ^a   Brown III, C L ^b   Balakrishnan, M ^b   Hedley, J ^c   Stevenson, J T M ^a   Bond, S ^a   Dunare, C C ^a   Harris, A J ^c   Burdess, J S ^c   Mitkova, M ^b   Kozicki, M N ^b   Walton, A J ^a  

^a UNIVERSITY OF EDINBURGH   (United Kingdom)

^b ARIZONA STATE UNIVERSITY   (United States)

^c NEWCASTLE UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ANODES; CATHODES; ELECTRIC POTENTIAL; INTEGRATION; MICROMACHINING; NATURAL FREQUENCIES; POLYSILICON; RESONATORS; TUNING;

ELECTROCHEMICAL TUNING; FREQUENCY TUNING; POLYSILICON RESONATORS; VOLTAGE FREQUENCY;

MICROELECTROMECHANICAL DEVICES;

EID: 26944477011     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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