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Volumn 5786, Issue , 2005, Pages 130-136
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Surface characterisation and surface energy measurements on Boron phosphide films prepared by PECVD
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Author keywords
[No Author keywords available]
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
BORON COMPOUNDS;
INTERFACIAL ENERGY;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
PROTECTIVE COATINGS;
SCANNING ELECTRON MICROSCOPY;
TRIBOLOGY;
X RAY PHOTOELECTRON SPECTROSCOPY;
BORON PHOSPHIDE FILMS;
NANO-INDENTATION;
SURFACE CHARACTERIZATION;
VAN-OSS-CHAUDHARY-GOOD (VOCG) METHOD;
THIN FILMS;
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EID: 26844573918
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.603327 Document Type: Conference Paper |
Times cited : (8)
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References (5)
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