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Volumn 5786, Issue , 2005, Pages 130-136

Surface characterisation and surface energy measurements on Boron phosphide films prepared by PECVD

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; BORON COMPOUNDS; INTERFACIAL ENERGY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PROTECTIVE COATINGS; SCANNING ELECTRON MICROSCOPY; TRIBOLOGY; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 26844573918     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.603327     Document Type: Conference Paper
Times cited : (8)

References (5)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.