Performance of a serial-connection multi-chamber piezoelectric micropump

Guangxue Jingmi Gongcheng/Optics and Precision Engineering

Volumn 13, Issue 5, 2005, Pages 535-541

  Kan, Jun Wu ^a,b   Xuan, Ming ^b   Liu, Guo Jun ^a   Yang, Zhi Gang ^a   Wu, Yi Hui ^b  

^a JILIN UNIVERSITY   (China)

^b CHANGCHUN INSTITUTE OF OPTICS   (China)

Author keywords

Cantilever valve; Micropump; Multi chamber; Piezoelectric actuator

Indexed keywords

ACTUATORS; FABRICATION; GEOMETRY; PERFORMANCE; PIEZOELECTRIC DEVICES; PRESSURE; STRUCTURES (BUILT OBJECTS); VALVES (MECHANICAL);

CANTILEVER VALVE; MICROPUMP; MULTICHAMBER; PIEZOELECTRIC ACTUATOR;

PUMPS;

EID: 26844534612     PISSN: 1004924X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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