Effect of the bombarding-ion mass in alloy sputtering

JETP Letters

Volumn 63, Issue 7, 1996, Pages 532-536

  Tubolt'sev, V S ^a   Chernysh, V S ^a   Kulikauskas, V S ^a  

^a MOSCOW STATE UNIVERSITY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 26844451502     PISSN: 00213640     EISSN: None     Source Type: Journal    
DOI: 10.1134/1.567061     Document Type: Article

References (11)

1. R. R. Olson, M. E. Kang, and G. K. Wehner, J. Appl. Phys. 50, 3677 (1979).
2. H. H. Andersen, J. Chevalier, and V. S. Chemysh, Nucl. Instrum. Methods 191, 241 (1981).
3. W. Huang, Surf. Interface Analysis 14, 469 (1989).
4. T. Nagatomi, K. Min, and R. Shimizu, Jpn. J. Appl. Phys. 33, 6675 (1994).
5. H. H. Andersen, V. S. Chernysh, B. Stenum et al., Surf. Sci. 123, 39 (1982).
6. P. Sigmund, A. Oliva, and G. Falcone, Nucl. Instrum. Methods 194, 541 (1982).
7. V. S. Chernysh, V. S. Tubol'tsev, and V. S. Kulikauskas, Poverkhnost' 2, 89 (1995).
8. A. A. Andreev, V. I. Bachurin, S. P. Linnik, and V. S. Chernysh, in Secondary Ion and Ion-Photon Emission [in Russian], Kharkov, 1983, p. 309.
9. J. W. Mayer and E. Rimini, Ion Beam Handbook for Material Analysis, Academic Press, New York, 1977.
10. L. D. Landau and E. M. Lifshitz, Mechanics, Pergamon Press, N. Y. [Russian original, Nauka, Moscow, 1988].
11. J. P. Biersack and J. F. Zeigler, TRIM PC Version, 1985.