Modeling MEMS resonators with rod-like components accounting for anisotropy, temperature, and strain dependencies

International Journal of Solids and Structures

Volumn 42, Issue 26, 2005, Pages 6523-6549

  Lauderdale, Todd A ^a,b   O'Reilly, Oliver M ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b NORTHROP GRUMMAN CORPORATION   (United States)

Author keywords

Cosserat rod; MEMS; Silicon; Strain gauge

Indexed keywords

ANISOTROPY; FREQUENCIES; POLYCRYSTALLINE MATERIALS; SILICON; STRAIN RATE; TEMPERATURE DISTRIBUTION; VIBRATIONS (MECHANICAL);

COSSERAT ROD; MEMS; STRAIN GAUGE;

MICROELECTROMECHANICAL DEVICES;

EID: 26844438473     PISSN: 00207683     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijsolstr.2005.06.010     Document Type: Article

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