Ionization mechanism in a liquid-metal ion source. Source for high-melting metals

Technical Physics

Volumn 42, Issue 11, 1997, Pages 1317-1321

  Sikharulidze, G G ^a  

^a INSTITUTE OF MICROELECTRONICS TECHNOLOGY AND HIGH PURITY MATERIALS   (Russian Federation)

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EID: 26644445017     PISSN: 10637842     EISSN: None     Source Type: Journal    
DOI: 10.1134/1.1258869     Document Type: Article

References (19)

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