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Volumn 38, Issue 14, 1988, Pages 9657-9666

Kinetics of H2 passivation of Pb centers at the (111) Si-SiO2 interface

Author keywords

[No Author keywords available]

Indexed keywords


EID: 26544473410     PISSN: 01631829     EISSN: None     Source Type: Journal    
DOI: 10.1103/PhysRevB.38.9657     Document Type: Article
Times cited : (239)

References (44)
  • 1
    • 84926839460 scopus 로고    scopus 로고
    • O. L. Krivanek, D. C. Tsui, T. T. Sheng, and A. Kamgar, in The Physics of SiO"2"_ and Its interfaces, edited by S. T. Pantelides (Pergamon, New York, 1978), p. 356.
  • 6
    • 84926817374 scopus 로고    scopus 로고
    • E. H. Poindexter, E. R. Ahlstrom, and P. J. Caplan, in The Physics of SiO"2"_ and Its Interfaces, Ref. 1, p. 227.
  • 23
    • 84926817373 scopus 로고    scopus 로고
    • Our result is significantly different than that obtained by Johnson et al (Ref. 11).
  • 24
    • 84926839459 scopus 로고    scopus 로고
    • Our white etch, which is an isotropic silicon etch, consisted of HF acid (80 ml), nitric acid (80 ml), acetic acid (280 ml), and acetic acid saturated with iodine (11 ml). This solution gives an silicon etch rate of 1000-2000 Å per 1 min. The etch rate is controlled by the amount of acetic acid. After etching, our samples were rinsed in deionized water and sonic cleaned in methanol.
  • 25
    • 84926839458 scopus 로고    scopus 로고
    • Our sample tube was pumped with an Alcatel turbomolecular pump bakced by an Alcatel mechanical vacuum pump. Initial pump down of the sample tube was achieved by ``leaking'' gas to the turbomolecular pump.
  • 26
    • 84926817372 scopus 로고    scopus 로고
    • All gases introduced into the sample tube are passed through individual filters consisting of a mixture of no. 13X molecular sieve and Drierite to remove residual oil and water.
  • 41
    • 84926817371 scopus 로고    scopus 로고
    • J. Vitko, C. M. Hartwig, and P. L. Mattern, in The Physics of SiO"2"_ and Its Interfaces, Ref. 1, p. 215.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.