Dynamic meniscus models for MEMS elements

Microsystem Technologies

Volumn 11, Issue 8-10, 2005, Pages 1132-1137

  Matsuoka, H ^a   Matsumoto, S ^a,b   Fukui, S ^a  

^a TOTTORI UNIVERSITY   (Japan)

^b NIDEC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY CONDITIONS; CONTACT ANGLE; LAPLACE TRANSFORMS; LINEARIZATION; MATHEMATICAL MODELS; PRESSURE EFFECTS; REYNOLDS NUMBER; VIBRATIONS (MECHANICAL); VISCOSITY;

DYNAMIC MENISCUS MODELS; SOLID SURFACES; VARIABLE BOUNDARY POSITION (VBP) MODELS; VARIABLE CONTACT ANGLE (VCA);

MICROELECTROMECHANICAL DEVICES;

EID: 26444588037     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-005-0514-8     Document Type: Conference Paper

References (11)

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9. Matsuoka H, Matsumoto S, Fukui S to be submitted in Trans. ASME, J Tribol or Matsumoto S (2004) Master Thesis, Tottori University, (in Japanese)
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