Thermocapillary actuation of liquids using patterned microheater arrays

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 667-669

  Valentino, J P ^a   Darhuber, A A ^a   Troian, S M ^a   Wagner, S ^a  

^a Princeton University   (United States)

Author keywords

Chemical engineering; Chromium; Glass; Gold; Heating; Liquids; Microfluidics; Nanobioscience; Power dissipation; Surface tension

Indexed keywords

ACTUATORS; CAPILLARY FLOW; CHEMICAL ENGINEERING; CHROMIUM; ENERGY DISSIPATION; GLASS; GOLD; HEATING; HEATING EQUIPMENT; LIQUIDS; MICROELECTROMECHANICAL DEVICES; MICROFLUIDICS; MICROSYSTEMS; SUBSTRATES; SURFACE TENSION; TRANSDUCERS;

CHEMICAL PATTERNING; FLUORINATED MONOLAYER; MICRO FLUIDIC SYSTEM; MICRO-HEATER ARRAY; MICROFLUIDIC ACTUATION; NANOBIOSCIENCES; OPERATING VOLTAGE; THERMOCAPILLARY ACTUATION;

SOLID-STATE SENSORS;

EID: 26444502169     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215561     Document Type: Conference Paper

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