Large-size liftable inverted-nanobowl sheets as reusable masks for nanolithiography

Nano Letters

Volumn 5, Issue 9, 2005, Pages 1784-1788

  Wang, Xudong ^a   Lao, Changshi ^a   Graugnard, Elton ^a   Summers, Christopher J ^a   Wang, Zhong L ^a  

^a Georgia Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC LAYER DEPOSITION (ALD); ION MILLING; NANOBOWL SHEETS; NANODOT PATTERNS;

COMMINUTION; ELECTRODEPOSITION; ETCHING; NANOTECHNOLOGY; POLYSTYRENES; SELF ASSEMBLY; TITANIUM DIOXIDE;

NANOSTRUCTURED MATERIALS;

EID: 25844511120     PISSN: 15306984     EISSN: None     Source Type: Journal    
DOI: 10.1021/nl051389x     Document Type: Article

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