CF4 plasma treatment of poly(dimethylsiloxane): Effect of fillers and its application to high-aspect-ratio UV embossing

Langmuir

Volumn 21, Issue 19, 2005, Pages 8905-8912

  Yan, Y H ^a,b   Chan Park, M B ^a,b   Yue, C Y ^b  

^a Nanyang Technological University   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CENTRIFUGATION; FLUORINE; HYDROPHILICITY; PLASMAS; POLYPROPYLENES; QUARTZ; SILICA; SURFACE ROUGHNESS;

PDMS SURFACES; PLASMA TREATMENT;

CARBON INORGANIC COMPOUNDS;

ARGON; BAYSILON; CARBON TETRAFLUORIDE; DIMETICONE; FLUOROCARBON; SILICON DIOXIDE; SILICONE DERIVATIVE;

ARTICLE; ARTIFICIAL MEMBRANE; ATOMIC FORCE MICROSCOPY; CHEMISTRY; RADIATION EXPOSURE; SENSITIVITY AND SPECIFICITY; SPECTROPHOTOMETRY; SURFACE PROPERTY; THERMODYNAMICS; ULTRAVIOLET RADIATION; X RAY;

ARGON; DIMETHYLPOLYSILOXANES; FLUOROCARBONS; MEMBRANES, ARTIFICIAL; MICROSCOPY, ATOMIC FORCE; QUARTZ; SENSITIVITY AND SPECIFICITY; SILICON DIOXIDE; SILICONES; SPECTROPHOTOMETRY; SURFACE PROPERTIES; THERMODYNAMICS; ULTRAVIOLET RAYS; X-RAYS;

EID: 25844433911     PISSN: 07437463     EISSN: None     Source Type: Journal    
DOI: 10.1021/la051580m     Document Type: Article

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