Microfabricated fuel cells with thin-film silicon dioxide proton exchange membranes

Journal of the Electrochemical Society

Volumn 152, Issue 8, 2005, Pages

  Moore, Christopher W ^a   Li, Jun ^a   Kohl, Paul A ^a  

^a Georgia Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUITS; ION EXCHANGE MEMBRANES; PHOTOLITHOGRAPHY; PROTONS; REACTIVE ION ETCHING; SILICA; SILICON WAFERS; SPIN COATING; THIN FILMS;

MICROFABRICATED FUEL CELLS; NAFION; OXIDE FILMS; PROTON EXCHANGE MEMBRANES (PEM);

FUEL CELLS;

EID: 25644452704     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1949027     Document Type: Article

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