The characteristic criterion of the growth of metallic films from discontinuous to continuous

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5774, Issue , 2005, Pages 39-42

  Fan, Ping ^a,b   Qi, Hong Ji ^a   Yi, Kui ^a   Shao, Jian Da ^a   Fan, Zheng Xiu ^a  

^a SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS   (China)

^b SHENZHEN UNIVERSITY   (China)

Author keywords

A characteristic criterion; Continuous film; Discontinuous film; Ion beam sputtering; Metallic films

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHARACTERIZATION; COBALT; ELECTRIC CONDUCTIVITY;

A CHARACTERISTIC CRITERION; CONTINUOUS FILMS; DISCONTINUOUS FILMS; ION BEAM SPUTTERING;

METALLIC FILMS;

EID: 25644435777     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.607271     Document Type: Conference Paper

References (5)

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