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Volumn 426-431, Issue II, 2005, Pages 926-932
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High rate DC-reactive sputter deposition of Y2O3 film on the textured metal substrate for the superconducting coated conductor
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Author keywords
Buffer layer; Coated conductor; DC reactive sputtering; Y2O3
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Indexed keywords
DEPOSITION;
OXIDATION;
SPUTTERING;
SUPERCONDUCTING MATERIALS;
THIN FILMS;
BUFFER LAYERS;
COATED CONDUCTORS;
DC REACTIVE SPUTTERING;
Y2O3;
YTTRIUM BARIUM COPPER OXIDES;
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EID: 25644435599
PISSN: 09214534
EISSN: None
Source Type: Journal
DOI: 10.1016/j.physc.2005.02.085 Document Type: Article |
Times cited : (22)
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References (8)
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