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Volumn 21, Issue 3, 2005, Pages 131-135

Wrinkling of a debonded initially compressed Si1-xGex film

Author keywords

Si Ge alloys; Stress relaxation; Thin films; Wrinkling

Indexed keywords

CHEMICAL BONDS; ETCHING; MATHEMATICAL MODELS; POISSON RATIO; SILICON ALLOYS; STRESS RELAXATION;

EID: 25444498624     PISSN: 17277191     EISSN: None     Source Type: Journal    
DOI: 10.1017/S1727719100000563     Document Type: Article
Times cited : (10)

References (10)
  • 1
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    • Jain, S. C., Decoutere, S. Willander, M. and Maes, H. E., "SiGe HBTs for Applications in BiCMOS Technology: I. Stability, Reliability and Material Parameters," Semicond. Sci. and Technol., 16, pp. R51-R65 (2001).
    • (2001) Semicond. Sci. and Technol. , vol.16
    • Jain, S.C.1    Decoutere, S.2    Willander, M.3    Maes, H.E.4
  • 2
    • 0342853202 scopus 로고    scopus 로고
    • High-mobility Si and Ge structures
    • Schaffler, F., "High-Mobility Si and Ge Structures," Semicond. Sci. and Technol., 12, pp. 1515-1549 (1997).
    • (1997) Semicond. Sci. and Technol. , vol.12 , pp. 1515-1549
    • Schaffler, F.1
  • 4
    • 0035280720 scopus 로고    scopus 로고
    • Fabrication of conducting GeSi/Si micro- and nanotubes and helical microcoils
    • Golod, S. V., Prinz, V. Ya., Mashanov, V. I. and Gutakovsky, A. K., "Fabrication of Conducting GeSi/Si Micro- and Nanotubes and Helical Microcoils," Semicond. Sci. and Technol., 16, pp.181-185 (2001).
    • (2001) Semicond. Sci. and Technol. , vol.16 , pp. 181-185
    • Golod, S.V.1    Prinz, V.Ya.2    Mashanov, V.I.3    Gutakovsky, A.K.4
  • 5
    • 0001020804 scopus 로고    scopus 로고
    • Free-standing conductive GeSi/Si helical microcoils, micro- and nanotubes
    • Berlin, Germany, Inst. Phys. Conf. Ser.
    • Prinz, V. Ya., Golod, S. V., Mashanov, V. I. and Gutakovsky, A. K., "Free-Standing Conductive GeSi/Si Helical Microcoils, Micro- and Nanotubes," Proc. 26th Int. Symp. Compound Semiconductors, Berlin, Germany, Inst. Phys. Conf. Ser., 166, pp. 203-206 (2000).
    • (2000) Proc. 26th Int. Symp. Compound Semiconductors , vol.166 , pp. 203-206
    • Prinz, V.Ya.1    Golod, S.V.2    Mashanov, V.I.3    Gutakovsky, A.K.4
  • 7
    • 0242652769 scopus 로고    scopus 로고
    • Geometry and physics of wrinkling
    • Cerda, E. and Mahadevan, L., "Geometry and Physics of Wrinkling," Phys. Rev. Lett., 90, 074302 (2003).
    • (2003) Phys. Rev. Lett. , vol.90 , pp. 074302
    • Cerda, E.1    Mahadevan, L.2
  • 8
    • 21544464728 scopus 로고
    • 1-x/Si strained-layer heterostructures
    • 1-x/Si Strained-Layer Heterostructures," Appl. Phys. Lett., 47, pp. 322-324 (1985).
    • (1985) Appl. Phys. Lett. , vol.47 , pp. 322-324
    • People, R.1    Bean, J.C.2
  • 10
    • 0036152574 scopus 로고    scopus 로고
    • Si/Ge nanostructures
    • Brunner, K., "Si/Ge Nanostructures," Rep. Prog. Phys., 65, pp. 27-79 (2002).
    • (2002) Rep. Prog. Phys. , vol.65 , pp. 27-79
    • Brunner, K.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.