Laser-induced breakdown spectroscopy as a diagnostic tool for thin films elemental composition

Spectrochimica Acta - Part B Atomic Spectroscopy

Volumn 60, Issue 7-8, 2005, Pages 1098-1102

  Caneve, L ^a   Colao, F ^a   Sarto, F ^b   Spizzichino, V ^a   Vadrucci, M ^b  

^a ENEA   (Italy)

^b ENEA C R CASACCIA   (Italy)

Author keywords

Composition; LIBS; Thin films

Indexed keywords

COMPOSITION; DATA REDUCTION; ELECTRIC PROPERTIES; FERROELECTRIC THIN FILMS; LASER ABLATION; LASER APPLICATIONS; MAGNETIC PROPERTIES; STOICHIOMETRY;

ATOMIC RATIO; ELEMENTAL COMPOSITION; LASER PARAMETERS; LIBS;

SPECTROSCOPIC ANALYSIS;

EID: 25444482785     PISSN: 05848547     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sab.2005.05.011     Document Type: Conference Paper

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