Boron passivation and its reactivation in mesoporous silicon: A "chemical" model

Physica Status Solidi (A) Applications and Materials Science

Volumn 202, Issue 8, 2005, Pages 1567-1570

  Garrone, E ^a   Geobaldo, F ^a   Rivolo, P ^a   Salvador, G P ^a   Pallavidino, L ^a   Boarino, L ^b   Amato, G ^b   Giamello, E ^c   Chiesa, M ^c   Gobetto, R ^c   Ugliengo, P ^c  

^a POLITECNICO DI TORINO   (Italy)

^b ISTITUTO ELETTROTECNICO NAZIONALE GALILEO FERRARIS   (Italy)

^c UNIVERSITY OF TURIN   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

BORON PASSIVATION; MESOPOROUS SILICON (M-PS); REACTIVATION;

BORON; ETCHING; FOURIER TRANSFORM INFRARED SPECTROSCOPY; NUCLEAR MAGNETIC RESONANCE; PASSIVATION;

POROUS SILICON;

EID: 25444454069     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.200461184     Document Type: Conference Paper

References (4)

1. G. Polisski, D. Kovalev, G. G. Dollinger, T. Sulima, and F. Koch, Physica B 273/274, 951 (1999).
2. L. Boarino, F. Geobaldo, S. Borini, A. M. Rossi, P. Rivolo, M. Rocchia, E. Garrone, and G. Amato, Phys. Rev. B 64, 205308 (2001).
3. F. Geobaldo, E. Garrone, G. Amato et al., submitted to Chem. Phys. Chem.
4. M. J. Frisch, G. W. Trucks, H. B. Schlegel, G. E. Scuseria, M. A. Robb, J. R. Cheeseman, V. G. Zakrzewski, Jr., J. A. Montgomery, R. E. Stratmann, J. C. Burant, S. Dapprich, J. M. Millam, A. D. Daniels, K. N. Kudin, M. C. Strain, O. Farkas, J. Tomasi, V. Barone, M. Cossi, R. Cammi, B. Mennucci, C. Pomelli, C. Adamo, S. Clifford, J. Ochterski, G. A. Petersson, P. Y. Ayala, Q. Cui, K. Morokuma, D. K. Malick, A. D. Rabuck, K. Raghavachari, J. B. Foresman, J. Cioslowski, J. V. Ortiz, A. G. Baboul, B. B. Stefanov, G. Liu, A. Liashenko, P. Piskorz, I. Komaromi, R. Gomperts, R. L. Martin, D. J. Fox, T. Keith, M. A. Al-Laham, C. Y. Peng, A. Nanayakkara, C. Gonzalez, M. Challacombe, P. M. W. Gill, B. Johnson, W. Chen, M. W. Wong, J. L. Andres, C. Gonzalez, M. Head-Gordon, E. S. Replogle, and J. A. Pople, Gaussian'98, Revision A.7, Gaussian, Inc., Pittsburgh PA (1998).