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Microsystem Technologies
Volumn 4, Issue 1, 1997, Pages 40-45
High-aspect micro-wingwheels in photosensitive glass
Author keywords

[No Author keywords available]
Indexed keywords

EID: 2542620611     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s005420050090     Document Type: Article
Times cited : (5)
References (10)
  • 1
    • 2542592339 scopus 로고    scopus 로고
    • Technologies for the Manufacturing of Micro- and Miniactuators Based on Usage of Microstructurable Glass Materials
    • H. Reichl, A. Heuberger (eds.) 5th Conference on Micro Electro, Opto, Mechanical Systems and Components, Potsdam, Sept. 17-19, Proceedings, Berlin, Offenbach: VDE
    • Albrecht A; Harnisch A; Hülsenberg D; Kallenbach E; Riemer D; Zoppig V: (1996) Technologies for the Manufacturing of Micro- and Miniactuators Based on Usage of Microstructurable Glass Materials, In: H. Reichl, A. Heuberger (eds.) Micro System Technologies 96, 5th Conference on Micro Electro, Opto, Mechanical Systems and Components, Potsdam, Sept. 17-19, Proceedings, Berlin, Offenbach: VDE, 639-644
    • (1996) Micro System Technologies 96 , pp. 639-644
    • Albrecht, A.1    Harnisch, A.2    Hülsenberg, D.3    Kallenbach, E.4    Riemer, D.5    Zoppig, V.6
  • 4
    • 0026916566 scopus 로고
    • Integrated measuring system for the detection of the revolutions of LIGA microturbines in view of a volumetric flow sensor
    • Himmelhaus M; Bley P; Mohr J; Wallrabe U: (1992) Integrated measuring system for the detection of the revolutions of LIGA microturbines in view of a volumetric flow sensor. Journal of micromechanics and microengineering 2; 196-198
    • (1992) Journal of Micromechanics and Microengineering , vol.2 , pp. 196-198
    • Himmelhaus, M.1    Bley, P.2    Mohr, J.3    Wallrabe, U.4
  • 5
    • 0026412812 scopus 로고
    • Glasses and glass-ceramics for application in micromechanics
    • Hulsenberg D; Bruntsch R: (1991) Glasses and glass-ceramics for application in micromechanics. Journal of Non-Crystalline Solids 129; 199-205
    • (1991) Journal of Non-Crystalline Solids , vol.129 , pp. 199-205
    • Hulsenberg, D.1    Bruntsch, R.2
  • 7
    • 0027664230 scopus 로고
    • Excimer laser processing of BK7 and BGG31 glasses
    • Nowak R; Metev S; Sepold G; Groskopf K: (1993) Excimer laser processing of BK7 and BGG31 glasses. Glastech. Ber. 66/9; 227-233
    • (1993) Glastech. Ber. , vol.66 , Issue.9 , pp. 227-233
    • Nowak, R.1    Metev, S.2    Sepold, G.3    Groskopf, K.4
  • 8
    • 0029274782 scopus 로고
    • Micro-windmill for optical scanning and flow measurement
    • Ross M; Pister KSJ: (1995) Micro-windmill for optical scanning and flow measurement. Sensors and Actuators A 46-47; 576-579
    • (1995) Sensors and Actuators A , vol.46-47 , pp. 576-579
    • Ross, M.1    Pister, K.S.J.2

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.