Structure and properties of Ti-Si-N coatings produced by magnetron sputtering of SHS targets

Fizika Metallov i Metallovedenie

Volumn 97, Issue 3, 2004, Pages 96-103

  Kiryukhantsev Korneev, F V ^a   Shtanskij, D V ^b   Shevejko, A N ^b   Levashov, E A ^b   Lyasotskij, I V ^b   D'yakonova, N B ^b  

^a NATIONAL UNIVERSITY OF SCIENCE AND TECHNOLOGY MISIS   (Russian Federation)

^b NONE

Author keywords

[No Author keywords available]

Indexed keywords

ADDITIVES; COATINGS; COMPOSITION EFFECTS; ELASTIC MODULI; FRICTION; HARDNESS; MAGNETRON SPUTTERING; NITROGEN; SILICON; TARGETS; WEAR RESISTANCE;

TITANIUM ALLOYS;

EID: 2542595511     PISSN: 00153230     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (26)