Peculiarities of the oxidation of porous silicon during aqueous after-etching

Technical Physics Letters

Volumn 30, Issue 4, 2004, Pages 259-261

  Kostishko, B M ^a   Appolonov, S V ^a   Salomatin, S Ya ^a   Kostishko, A E ^a  

^a ULYANOVSK STATE UNIVERSITY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 2542589502     PISSN: 10637850     EISSN: None     Source Type: Journal    
DOI: 10.1134/1.1748593     Document Type: Article

References (18)

1. A. Uhlir, Bell Syst. Tech. J. 35, 333 (1956).
2. L. T. Canham, Appl. Phys. Lett. 57, 1046 (1990).
3. Y. Xiao, M. J. Heben, J. M. McCullough, et al., Appl. Phys. Lett. 62, 1152 (1993).
4. E. A. Petrova, K. N. Bogoslovskaya, L. A. Balagurov, et al., Mater. Sci. Eng., B 69-70, 152 (2000).
5. H. Mimura, T. Futagi, T. Matsumoto, et al., Jpn. J. Appl. Phys. 33, 586 (1994).
6. D. N. Goryachev, G. Polisskiǐ, and O. M. Sreseli, Fiz. Tekh. Poluprovodn. (St. Petersburg) 32, 1016 (1998) [Semiconductors 32, 910 (1998)].
7. D. N. Goryachev, G. Polisskiǐ, and O. M. Sreseli, Fiz. Tekh. Poluprovodn. (St. Petersburg) 32, 1016 (1998) [Semiconductors 32, 910 (1998)].
8. S. A. Gavrilov, A. I. Belogorokhov, and L. I. Belogorokhova, Fiz. Tekh. Poluprovodn. (St. Petersburg) 36, 104 (2002) [Semiconductors 36, 98 (2002)].
9. S. A. Gavrilov, A. I. Belogorokhov, and L. I. Belogorokhova, Fiz. Tekh. Poluprovodn. (St. Petersburg) 36, 104 (2002) [Semiconductors 36, 98 (2002)].
10. M. E. Kompan and I. Yu. Shabanov, Fiz. Tekh. Poluprovodn. (St. Petersburg) 29, 1250 (1995) [Semiconductors 29, 971 (1995)].
11. M. E. Kompan and I. Yu. Shabanov, Fiz. Tekh. Poluprovodn. (St. Petersburg) 29, 1250 (1995) [Semiconductors 29, 971 (1995)].
12. B. M. Kostishko and Yu. S. Nagornov, Zh. Tekh. Fiz. 71 (7), 60 (2001) [Tech. Phys. 46, 847 (2001)].
13. B. M. Kostishko and Yu. S. Nagornov, Zh. Tekh. Fiz. 71 (7), 60 (2001) [Tech. Phys. 46, 847 (2001)].
14. B. M. Kostishko, S. V. Appolonov, A. E. Kostishko, et al., Izv. Vyssh. Uchebn. Zaved., Mater. Elektron. Tekh., No. 1, 38 (2001).
15. B. M. Kostishko and S. V. Appolonov, in Proceedings of the 2nd All-Russia Scientific-Engineering Computer-Aided Conference on Measurement Methods and Instruments, Nizhni Novgorod, 2000, Part 1, p. 36.
16. S. S. Chao, J. E. Tyler, V. Takaji, et al., J. Vac. Sci. Technol. A 4, 1574 (1986).
17. Electron and Ion Spectroscopy of Solids, Ed. by L. Fiermans, J. Vennik, and W. Dekeyser (Plenum, New York, 1978; Mir, Moscow, 1981), pp. 256-257.
18. B. M. Kostishko, Yu. S. Nagornov, and S. V. Appolonov, Izv. Vyssh. Uchebn. Zaved., Élektronika, No. 4, 12 (2001).