Stoichiometry and Properties of Undoped Indium Oxide Films Prepared by Reactive Evaporation

Inorganic Materials

Volumn 33, Issue 8, 1997, Pages 816-819

  Kostishko, B M ^a   Orlov, A M ^a   Gonchar, L I ^a  

^a Moscow State University   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 2542538396     PISSN: 00201685     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (13)

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3. Ishibashi, S., Higuchi, Y, Ota, Y., and Nakamura, K., Low Resistivity Indium-Tin Oxide Transparent Conductive Films: II. Effect of Sputtering Voltage on Electrical Properties of Films, J. Vac. Sci. Technol., F, 1990, vol. 8, no. 3, part 1, pp. 1403-1406.
4. 3 Films Prepared by Reactive Ion Plating, Appl. Phys. Lett., 1994, vol. 64, no. 10, pp. 1215-1217.
5. Abbas, M., Qazi, I., Samina, A., Masaood, M., Majeed, A., and ul Hag, A., Evidence of a Simple Cubic Phase in Electron Beam Vacuum Evaporated Indium Oxide on a Glass Substrate, J. Vac. Sci. Technol., A, 1995, vol. 13, no. 1, pp. 151-152.
6. 3 Films by a Novel Reactive Evaporation Technique, Thin Solid Films, 1980, vol. 69, pp. 63-68.
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8. Batavin, V.V., Kontsevoi, Yu.A., and Fedorovich, Yu.V., Izmerenie parametrov poluprovodnikovykh materialov i Struktur (Characterization of Semiconductor Materials and Structures), Moscow: Radio i Svyaz', 1985.
9. Khvostov, V.V., Guseva, M.B., Babaev, V.G., and Rylova, O.Yu., Auger Spectroscopy Studies of Electronic Structure of Amorphous Carbon Films, Surf. Sci., 1986, vol. 169, pp. 1253-1258.
10. Chopra, K., Thin Film Phenomena, New York: Wiley, 1969. Translated under the title Elektricheskie yavleniya v tonkikh plenkakh, Moscow: Mir, 1972.
11. Chopra, K., Thin Film Phenomena, New York: Wiley, 1969. Translated under the title Elektricheskie yavleniya v tonkikh plenkakh, Moscow: Mir, 1972.
12. Oxydation des métaux, Bénard, J., Ed., Paris: Gauthier-Villars, 1962, vol. 1, 1964, vol. 2. Translated under the title Okislenie metallov, Moscow: Metallurgiya, 1968.
13. Oxydation des métaux, Bénard, J., Ed., Paris: Gauthier-Villars, 1962, vol. 1, 1964, vol. 2. Translated under the title Okislenie metallov, Moscow: Metallurgiya, 1968.