Nonparametric smoothing of interferometric height maps using confidence values

Optical Engineering

Volumn 43, Issue 4, 2004, Pages 866-871

  Restle, Jochen ^a   Hissmann, Michael ^a   Hamprecht, Fred A ^b  

^a ROBERT BOSCH GMBH   (Germany)

^b UNIVERSITY OF HEIDELBERG   (Germany)

Author keywords

Confidence; Normalized convolution; Weighted regression; White light interferometry

Indexed keywords

CONFORMAL MAPPING; CONVOLUTION; IMAGE QUALITY; REGRESSION ANALYSIS;

INTERFEROMETRIC HEIGHT MAPS; NORMALIZED CONVOLUTION;

INTERFEROMETRY;

EID: 2542520748     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1666622     Document Type: Article

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