Numerical simulation of inductively coupled plasma flows under chemical non-equilibrium

International Journal of Numerical Methods for Heat and Fluid Flow

Volumn 14, Issue 4, 2004, Pages 538-558

  Degrez, Gérard ^a   Abeele, David Vanden ^b   Barbante, Paolo ^a,c   Bottin, Benot ^a,d  

^a VON KARMAN INSTITUTE FOR FLUID DYNAMICS   (Belgium)

^b UNIVERSITÉ LIBRE DE BRUXELLES   (Belgium)

^c POLITECNICO DI MILANO   (Italy)

^d Inst Suprieur Indust de Bruxelles   (Belgium)

Author keywords

Equilibrium methods; Flow; Numerical analysis; Plasma physics

Indexed keywords

COMPUTER SIMULATION; CONCENTRATION (PROCESS); DIFFUSION; MATHEMATICAL MODELS; PHASE EQUILIBRIA; PLASMAS; THERMAL EFFECTS; THERMODYNAMICS;

EQUILIBRIUM METHOD; PHYSICO-CHEMICAL MODELS; PLASMA FLOWS; PLASMA PHYSICS;

FLOW OF FLUIDS;

CHEMICAL ANALYSIS; EQUILIBRIUM; MATHEMATICAL ANALYSIS; MODEL; PLASMA TREATMENT;

EID: 2542507419     PISSN: 09615539     EISSN: None     Source Type: Journal    
DOI: 10.1108/09615530410532286     Document Type: Review

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