Optical properties of two-dimensional photonic-bandgap crystals characterized by spectral ellipsometry

Microelectronic Engineering

Volumn 73-74, Issue , 2004, Pages 920-926

  Hsieh, C I ^a   Chen, H L ^a   Chao, W C ^a   Ko, F H ^a  

^a NATIONAL NANO DEVICE LABORATORIES   (Taiwan)

Author keywords

2D photonic bandgap crystal; Effective medium model; Plane wave expansion method; Spectral ellipsometry

Indexed keywords

CRYSTAL STRUCTURE; CRYSTALS; ELECTRON BEAM LITHOGRAPHY; ELLIPSOMETRY; INFRARED RADIATION; LIGHT MODULATION; OPTICAL PROPERTIES; SILICON;

EFFECTIVE MEDIUM MODEL; PHOTONIC-BANDGAP CRYSTALS; PLANE-WAVE EXPANSION METHOD; SPECTRAL ELLIPSOMETRY;

PHOTONS;

EID: 2542501029     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(04)00245-X     Document Type: Conference Paper

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