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Volumn 84, Issue 18, 2004, Pages 3537-3539
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Depth-resolving structural analysis of GaN layers by skew angle x-ray diffraction
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Author keywords
[No Author keywords available]
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Indexed keywords
ABSORPTION;
ALGORITHMS;
ANGLE MEASUREMENT;
COMPUTATIONAL METHODS;
DIFFRACTOMETERS;
LIGHT EMITTING DIODES;
MATRIX ALGEBRA;
METALLORGANIC VAPOR PHASE EPITAXY;
OPTIMIZATION;
SEMICONDUCTOR QUANTUM WELLS;
SILICON;
SUBSTRATES;
X RAY DIFFRACTION;
FULL WIDTH AT HALF MAXIMUM (FWHM);
INCIDENT ANGLES;
MULTI-QUANTUM WELLS (MQW);
SKEW ANGLE X-RAY DIFFRACTION (SAXRD);
GALLIUM NITRIDE;
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EID: 2542498884
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1704870 Document Type: Article |
Times cited : (12)
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References (10)
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