Fabrication of chemical sensors based on Si/polymer bimorphs

Microelectronic Engineering

Volumn 73-74, Issue , 2004, Pages 847-851

  Chatzandroulis, S ^a   Tegou, E ^a   Goustouridis, D ^a   Polymenakos, S ^a   Tsoukalas, D ^a  

^a INSTITUTE OF MICROELECTRONICS   (Greece)

Author keywords

Bimorph; Capacitive; Chemical sensor; Humidity; Polymer; Selective layers; Sorption; Vapor

Indexed keywords

ARRAYS; BIOLOGICAL MEMBRANES; CAPACITANCE; CHEMISORPTION; DIAPHRAGMS; ELECTRODES; ETHANOL; METHANOL; POLYMERS; POLYMETHYL METHACRYLATES; POLYSILICON; POLYVINYL ACETATES;

BIMORPH; COMPLEX ODORS; SELECTIVE LAYERS; SILICON MEMBRANE;

CHEMICAL SENSORS;

EID: 2542489708     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(04)00232-1     Document Type: Conference Paper

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