One-dimensional capacitative micromachined ultrasonic transducer arrays for echographic probes

Microelectronic Engineering

Volumn 73-74, Issue , 2004, Pages 502-507

  Cianci, E ^a   Minotti, A ^a   Foglietti, V ^a   Caliano, G ^b   Pappalardo, M ^b  

^a CNR   (Italy)

^b ROMA TRE UNIVERSITY   (Italy)

Author keywords

Capacitative transducer array; Echographic imaging; Surface micromachining

Indexed keywords

ALUMINUM; CMOS INTEGRATED CIRCUITS; EVAPORATION; MEDICAL IMAGING; METALLIZING; MICROMACHINING; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RESONANCE; SURFACE PHENOMENA; TRANSDUCERS; ULTRASONIC DEVICES;

CAPACITATIVE TRANSDUCER ARRAYS; ECHOGRAPHIC IMAGING; SURFACE MICROMACHINING;

MICROELECTRONICS;

EID: 2542486875     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(04)00201-1     Document Type: Conference Paper

References (6)

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3. Memmi D., Foglietti V., Cianci E., Caliano G., Pappalardo M. Sensor. Actuat. A. 99:2002;85-91.
4. Ladabaum I., Jin X., Soh H.T., Atalar A., Khuri-Yakub B.T. IEEE Trans. Ultrason. Ferroelect. Freq. Contr. 45:1998;678-690.
5. Cianci E., Foglietti V., Memmi D., Caliano G., Caronti A., Pappalardo M. Precis Eng. 26:2002;347-354.
6. Caronti A., Caliano G., Iula A., Pappalardo M. IEEE Trans. Ultrason. Ferroelect. Freq. Contr. 49:2002;159-168.