Fabrication of nanoscale vertical colloid device architectures

Microelectronic Engineering

Volumn 73-74, Issue , 2004, Pages 542-546

  Parker, A J ^a   Childs, P A ^a   Palmer, R E ^a  

^a UNIVERSITY OF BIRMINGHAM   (United Kingdom)

Author keywords

Gold colloidal nanoparticles; Natural lithography; Silicon nanopillar; Vertical nanodevice

Indexed keywords

ELECTRON TUNNELING; EVAPORATION; LITHOGRAPHY; MONOLAYERS; PATTERN RECOGNITION; PHOTORESISTORS; SCANNING ELECTRON MICROSCOPY; SELF ASSEMBLY;

GOLD COLLOIDAL NANOPARTICLES; NATURAL LITHOGRAPHY; SILICON NANOPILLAR; VERTICAL NANODEVICE;

NANOSTRUCTURED MATERIALS;

EID: 2542421318     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2004.02.082     Document Type: Conference Paper

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