Mechanical properties of aerogel-like thin films used for MEMS

Journal of Micromechanics and Microengineering

Volumn 14, Issue 5, 2004, Pages 681-686

  Yokokawa, Ryuji ^a,d   Paik, Jong Ah ^b   Dunn, Bruce ^b   Kitazawa, Nobuaki ^c   Kotera, Hidetoshi ^a   Kim, Chang Jin ^d  

^a KYOTO UNIVERSITY   (Japan)

^b University of California   (United States)

^c NATIONAL DEFENSE ACADEMY   (Japan)

^d UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AEROGELS; ALUMINA; BLOCK COPOLYMERS; CANTILEVER BEAMS; ELASTIC MODULI; HARDNESS; INDENTATION; MESOPOROUS MATERIALS; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; PHOTOLITHOGRAPHY; REACTIVE ION ETCHING; SILICA; SILICON WAFERS;

MICROHUMIDITY; NANOIDENTATION; THIN FILM AEROGELS;

THIN FILMS;

EID: 2542419797     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/5/004     Document Type: Article

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