Applicability of holographic technique for analysis of non-linear dynamics of MEMS switch

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5763, Issue , 2005, Pages 405-413

  Ostasevicius, Vytautas ^a   Ragulskis, Minvydas ^a   Palevicius, Arvydas ^a   Kravcenkiene, V ^a   Janusas, Giedrius ^a  

^a KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

Author keywords

Laser holographic interferometry; Mathematical modeling; MEMS

Indexed keywords

CANTILEVER BEAMS; HEAT TRANSFER; HOLOGRAPHY; INVERSE PROBLEMS; MATHEMATICAL MODELS; NONLINEAR SYSTEMS; RESONATORS; SWITCHING SYSTEMS;

LASER HOLOGRAPHIC INTERFEROMETRY; MICRO-MECHANICAL RELAYS; NON-LINEAR DYNAMICS; NONLINEAR STIFFNESS;

MICROELECTROMECHANICAL DEVICES;

EID: 25144516698     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.599027     Document Type: Conference Paper

References (6)

1. Brown, G.C., and Pryputniewicz, R.J.,Holographic microscope for measuring displacements of vibrating microbeams using time-average electro-optic holography, Opt. Eng., 37:1398-1405, 1998.
2. Pryputniewicz, R.J., Furlong, C., Brown, G.C., and Pryputniewicz, E. J., Optical methodology for static and dynamic measurements of nanodisplacements, Proc. Internat. Congress on Experimental and Applied Mechanics in Emerging Technologies, Portland, OR, 2001, pp. 826-831.
3. Pryputniewicz, R.J., Stetson K. A.,Measurement of vibration patterns using electro-optic holography, Proc. SPIE, v.1162, 1989.
4. Ostasevicius, V., Palevicius, A., Daugela, A, Ragulskis, M., Palevicius, R., Holographic imaging technique for characterization of MEMS switch dynamics, Proc. SPIE Vol. 5389, Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology; Vijay K. Varadan; Ed., 2004, pp. 73-84.
5. Ostaševičius, Vytautas; Palevičius, Arvydas; Ragulskis, Minvydas Kazys, et al. Hybrid numerical - experimental optical investigation of non-linearity in MEMS dynamics. Iš: Unification of Analytical, Computational, and Experimental Solution Methodologies in MEMS and Nanotechnology, Springfield, Massachusetts, 27-29 October, 2004: proceedings of the International Invitational UACEM Symposium 15th in the Series. Bethel, 2004, pp. 347-353.
6. Ragulskis M., Palevicius A. and Ragulskis L. Plotting Holographic Interferograms for Visualization of Dynamic Results from Finite-Element Calculations, International Journal for Numerical Methods in Engineering, Vol. 56, 2003, pp.1647-1659.