Preparation and analysis of In2O2-SnO2 thin films deposited by magnetic sputtering

Zhongguo Youse Jinshu Xuebao/Chinese Journal of Nonferrous Metals

Volumn 15, Issue 8, 2005, Pages 1214-1218

  Li, Shi Tao ^a   Qiao, Xue Liang ^a   Chen, Jian Guo ^a  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

Burstin Moss effect; ITO thin films; Magnetic sputtering; Oxygen flow rate

Indexed keywords

EID: 25144460719     PISSN: 10040609     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (17)