Thickness and optical constants measurement of thin film growth with circular heterodyne interferometry

Thin Solid Films

Volumn 491, Issue 1-2, 2005, Pages 91-95

  Hsu, Cheng Chih ^a   Lee, Ju Yi ^b   Su, Der Chin ^c  

^a INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

^b NATIONAL CENTRAL UNIVERSITY   (Taiwan)

^c NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

Interferometry; Optical constants; Thickness monitoring

Indexed keywords

FILM GROWTH; INTERFEROMETRY; REFRACTIVE INDEX; THICKNESS MEASUREMENT;

GROWTH PROCESS; OPTICAL CONSTANTS; REFLECTION THEORY; THICKNESS MONITORING;

THIN FILMS;

EID: 25144459470     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.05.037     Document Type: Article

References (13)

1. J.J. Chen, J.D. Lin, and L.J. Sheu Thin Solid Films 354 1999 176
2. N.K. Zayer, R. Greef, K. Rogers, A.J.C. Grellier, and C.N. Pannell Thin Solid Films 352 1999 179
3. N. Fujimura, T. Nishihara, S. Goto, J. Xu, and T. Ito J. Cryst. Growth 130 1993 269
4. Y.G. Mo, R.O. Dillon, and P.G. Snyder J. Vac. Sci. Technol., A 17 1999 170
5. B.P. Singh Appl. Surf. Sci. 150 1999 95
6. G.N. Maragas, C.H. Kuo, S. Anand, R. Droopad, G.R.L. Sohie, and T. Levola J. Vac. Sci. Technol., A 13 1995 727
7. M. Henini III-Vs Rev. 13 2000 18
8. C.C. Hsu, and D.C. Su Appl. Opt. 41 2002 3936
9. M. Born, and E. Wolf Principles of Optics 1980 Pergamon Oxford, UK Chapter 1
10. E. Hecht Optics 1990 Addison-Wesley USA 334
11. M.H. Chiu, J.Y. Lee, and D.C. Su J. Opt. 29 1998 349
12. M.H. Chiu, J.Y. Lee, and D.C. Su Appl. Opt. 38 1999 4047
13. P. Petrik, T. Lohner, M. Fried, J. Gyulai, U. Boell, R. Berger, and W. Lehnert J. Appl. Phys. 92 2002 2374