Structural in situ studies of shape memory alloy (SMA) Ni-Ti thin films

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 238, Issue 1-4, 2005, Pages 319-322

  Martins, R M S ^a   Schell, N ^a   Silva, R J C ^b   Fernandes, F M Braz ^b  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^b DEPARTAMENTO DE CIÊNCIA DOS MATERIAIS   (Portugal)

Author keywords

Deposition by sputtering; In situ X ray diffraction; Structure and morphology

Indexed keywords

ACTUATORS; MICROELECTROMECHANICAL DEVICES; NICKEL ALLOYS; SHAPE MEMORY EFFECT; SPUTTERING; TITANIUM;

MICRO-FLUIDIC PUMPS; MICRO-MANIPULATORS; MICRO-VALVES;

THIN FILMS;

EID: 25144458030     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.06.070     Document Type: Conference Paper

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