Thick vacuum deposited silicon films suitable for the anode of Li-ion battery

Journal of Power Sources

Volumn 146, Issue 1-2, 2005, Pages 441-444

  Uehara, Makiko ^a   Suzuki, Junji ^a   Tamura, Kohki ^b   Sekine, Kyoichi ^a   Takamura, Tsutomu ^c  

^a RIKKYO UNIVERSITY   (Japan)

^b Shinkobedenki Co Ltd   (Japan)

^c HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Li ion batteries; New anode material; Silicon film; Surface roughening; Vacuum deposition

Indexed keywords

ETCHING; MORPHOLOGY; SILICON; SURFACE ROUGHNESS; THICK FILMS; VACUUM DEPOSITED COATINGS;

LI-ION BATTERIES; NEW ANODE MATERIAL; SILICON FILMS; SURFACE ROUGHENING; VACUUM DEPOSITION;

LITHIUM BATTERIES;

EID: 24944563749     PISSN: 03787753     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jpowsour.2005.03.097     Document Type: Conference Paper

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