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Volumn 123-124, Issue , 2005, Pages 281-284

Tunable response nano-mechanical beam resonator

Author keywords

Magneto motive excitation; MEMS; Modal analysis; Nano resonator

Indexed keywords

ELECTRODES; FREQUENCIES; FREQUENCY RESPONSE; MICROELECTROMECHANICAL DEVICES; MODAL ANALYSIS; NANOTECHNOLOGY; RESONANCE;

EID: 24944559194     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.03.074     Document Type: Conference Paper
Times cited : (5)

References (8)
  • 3
    • 0033100110 scopus 로고    scopus 로고
    • Micromechanical RF filters excited by the Lorenz force
    • D.S. Greywall Micromechanical RF filters excited by the Lorenz force J. Micromech. Microeng. 9 1999 78
    • (1999) J. Micromech. Microeng. , vol.9 , pp. 78
    • Greywall, D.S.1
  • 5
    • 0024769661 scopus 로고
    • Laterally driven polysilicon resonant microstructures
    • W.C. Tang, T.-C.H. Nguyen, and R.T. Howe Laterally driven polysilicon resonant microstructures Sens. Actuators 20 1989 25 32
    • (1989) Sens. Actuators , vol.20 , pp. 25-32
    • Tang, W.C.1    Nguyen, T.-C.H.2    Howe, R.T.3
  • 8
    • 24944581222 scopus 로고    scopus 로고
    • Focused ion beam fabrication of thermally actuated bimorph cantilevers
    • Rome, September 12-15
    • J. Teng, and P.D. Prewett Focused ion beam fabrication of thermally actuated bimorph cantilevers Technical Digest of Eurosensors XVIII Rome, September 12-15 2004 209 210
    • (2004) Technical Digest of Eurosensors XVIII , pp. 209-210
    • Teng, J.1    Prewett, P.D.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.